Cleanstream Model Comparison

Cleanstream Thermoelectric Heat Exchanger

Onboard chiller replacement to control temperature of high purity or corrosive fluids precisely. Dramatic energy savings compared to freon-based chiller.

Models Cleanstream 800C Cleanstream 1100 Cleanstream 550/H1500 Cleanstream H3000
Typical Application Semiconductor wet bench bath control Semiconductor wet bench bath control Semiconductor wet bench bath control Semiconductor wet bench bath control
Immersion lithography Immersion lithography Immersion lithography Immersion lithography
Electrochemical plating Electrochemical plating Electrochemical plating Electrochemical plating
Semiconductor copper deposition Semiconductor copper deposition Semiconductor copper deposition Semiconductor copper deposition
Configuration chemical bath temperature controller chemical bath temperature controller wide range chemical bath temperature controller in-line heater for chemical baths
Comparable Freon-based chiller 2700 W Freon chiller and 2000 W heater 2700 W Freon chiller and 2000 W heater 1350 W Freon chiller and 1000 W heater
Operating Range 5 to 40 °C (1100 W model)
10 to 35 °C (800 W model)
5 to 40 °C (1100 W model)
10 to 35 °C (800 W model)
10 to 90 °C 40 to 90 °C
Cooling Capacity 800 Watts @ 20°C with 20°C facility water 1100 Watts @ 25°C with 20°C facility water 550 Watts @ 25°C with 20°C facility water
Heating Capacity 1050 Watts @ 20°C 1500 Watts @ 25°C 1500 Watts 3000 Watts
Size (L x W x H) 16" x 9.75" x 3.1" (41 x 25 x 8 cm) 16" x 9.75" x 3.1" (41 x 25 x 8 cm) 16" x 9.75" x 3.1" (41 x 25 x 8 cm) 16" x 9.75" x 3.1" (41 x 25 x 8 cm)
Stability / Repeatability <± 0.05 °C <± 0.05 °C <± 0.05 °C <± 0.2 °C
Process Channels 1 1 1 1

Share this product